Parameter optimization of sub-35 nm contact-hole fabrication using particle swarm optimization approach.

Te-Sheng Li Chih-Ming Hsu

Published in: Expert Syst. Appl. (2010)

Keyphrases

parameter optimization
silicon on insulator
genetic algorithm ga
genetic algorithm
differential evolution
parameter settings
parameter estimation
support vector machine
integrated circuit
simulated annealing
real time
particle swarm optimization
pid controller
model selection
hyperparameters