Fast Level-Set-Based Inverse Lithography Algorithm for Process Robustness Improvement and Its Application.
Zhen GengZheng ShiXiaolang YanKai-sheng LuoWeiwei PanPublished in: J. Comput. Sci. Technol. (2015)
Keyphrases
- detection algorithm
- significant improvement
- theoretical analysis
- expectation maximization
- experimental evaluation
- preprocessing
- np hard
- computational efficiency
- times faster
- improved algorithm
- learning algorithm
- k means
- dynamic programming
- computational complexity
- recognition algorithm
- matching algorithm
- clustering method
- objective function
- bayesian networks
- tree structure
- segmentation algorithm
- high accuracy
- probabilistic model
- reinforcement learning
- computationally efficient
- optimization algorithm
- particle swarm optimization
- linear programming
- classification algorithm
- computational cost
- path planning
- cost function
- data streams