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Operational Modeling and Simulation in Semiconductor Manufacturing.
John W. Fowler
Michael C. Fu
Lee Schruben
Steven Brown
Frank Chance
Sean Cunningham
Courtland Hilton
Mani Janakiram
Richard Stafford
James Hutchby
Published in:
WSC (1998)
Keyphrases
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discrete event simulation
semiconductor manufacturing
process control
discrete event
production system
simulation model
supply chain
medical images
data sets
simulation environment
decision making
agent based modeling
databases
website
image processing
modeling method
collision detection
information systems