Heuristic simulated annealing approach for diffusion scheduling in a semiconductor Fab.
Yinzhi ZhouKan WuPublished in: ICIS (2017)
Keyphrases
- simulated annealing
- tabu search
- job shop scheduling problem
- solution quality
- metaheuristic
- wafer fabrication
- scheduling problem
- evolutionary algorithm
- combinatorial optimization
- hill climbing
- scheduling algorithm
- simulated annealing algorithm
- genetic algorithm
- iterative repair
- hybrid meta heuristic
- search procedure
- global optimum
- neighborhood search
- stochastic search
- diffusion process
- anisotropic diffusion
- real time database systems
- genetic algorithm ga
- resource allocation
- round robin
- resource constraints
- rolling horizon
- optimal solution
- bayesian networks
- scheduling policies
- feasible solution
- critical path
- unrelated parallel machines
- dynamic programming
- earth observing