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Robust Model-Predictive Control for Inductively Coupled Plasma Generation With a Semiphysical Simulation.

Junjie WangYanming LiuXiaotao LiuXiaoping LiHaojie ZhangDi Wang
Published in: IEEE Trans. Ind. Electron. (2021)
Keyphrases
  • model predictive control
  • decision trees
  • control system
  • real time
  • artificial intelligence
  • genetic programming
  • mathematical model