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An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism.

Daisuke YamaneWinston SunHarunobu SeitaShigeo KawasakiHiroyuki FujitaHiroshi Toshiyoshi
Published in: IEICE Electron. Express (2010)
Keyphrases
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