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Self-assembly technique for MEMS vertical comb electrostatic actuator.
Keiji Isamoto
T. Makino
A. Moroswa
Chongho Chong
Hiroyuki Fujita
Hiroshi Toshiyoshi
Published in:
IEICE Electron. Express (2005)
Keyphrases
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closed loop
control system
three dimensional
fluidized bed
working principle
real time
decision making
multiscale
control method