Sign in
Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film.
Hong Zhu
Jianmin Miao
Bangtao Chen
Zhihong Wang
Weiguan Zhu
Published in:
Int. J. Comput. Eng. Sci. (2003)
Keyphrases
</>
thin film
machine learning
fuzzy logic
multi layer