Model based double patterning lithography (DPL) and simulated annealing (SA).
Rance RodriguesSandip KunduPublished in: ISQED (2011)
Keyphrases
- simulated annealing
- tabu search
- simulated annealing algorithm
- evolutionary algorithm
- metaheuristic
- genetic algorithm
- optimization methods
- optimization method
- solution quality
- genetic algorithm ga
- hybrid algorithm
- combinatorial optimization
- particle swarm optimization pso
- global optimum
- search procedure
- hill climbing
- data sets
- preprocessing
- solution space
- multi agent systems
- wide range
- multiscale
- databases