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Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting.

Naiqi WuFeng ChuChengbin ChuMengChu Zhou
Published in: IEEE Trans. Syst. Man Cybern. Syst. (2013)
Keyphrases
  • petri net
  • colored petri nets
  • clustering algorithm
  • neural network
  • decision making
  • data analysis
  • stochastic petri net
  • manufacturing systems
  • story generation
  • high level petri nets