Login / Signup
Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting.
Naiqi Wu
Feng Chu
Chengbin Chu
MengChu Zhou
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2013)
Keyphrases
</>
petri net
colored petri nets
clustering algorithm
neural network
decision making
data analysis
stochastic petri net
manufacturing systems
story generation
high level petri nets