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Improved PID algorithms with application to excimer laser temperature control.

Mingqing HuXiaoquan HanZebing FengYi ZhouWeihu ZhouLujun BaiBing Li
Published in: ICSAI (2014)
Keyphrases
  • temperature control
  • control algorithm
  • learning algorithm
  • neural network
  • artificial intelligence
  • theoretical analysis
  • evolutionary algorithm
  • parameter tuning