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Nanosphere Photolithography: The Influence of Nanopore Arrays Disorder on Extraordinary Optical Transmission.

Andrei UshkovOlivier DelléaIsabelle VerrierThomas KampfeAlexey ShcherbakovJean-Yves MichalonYves Jourlin
Published in: PHOTOPTICS (2021)
Keyphrases
  • manufacturing systems
  • focal plane
  • integrated circuit
  • fiber optic
  • individual differences