Multiple-objective real-time scheduler for semiconductor wafer fab using Colored Timed Object-oriented Petri nets (CTOPN).
Huiran LiuZhibin JiangYen-Fei LeeRichard Y. K. FungPublished in: SMC (2003)
Keyphrases
- petri net
- multiple objectives
- real time
- object oriented
- semiconductor manufacturing
- multi objective
- petri net model
- discrete event systems
- colored petri nets
- fuzzy petri net
- manufacturing systems
- multi objective optimization
- service composition
- stochastic petri net
- concurrent systems
- ims ld
- real time systems
- state machines
- control system
- wafer fabrication
- dynamic systems
- knapsack problem
- greedy algorithm
- fitness function
- expert systems
- e learning