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A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale.
Hao Wang
Haiyang Quan
Jinqiu Zhou
Long Zhang
Jianbing Xie
Honglong Chang
Published in:
IEEE Trans. Ind. Electron. (2022)
Keyphrases
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