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Petri net-based response policies to process module failure in time-constrained single-arm cluster tools.

Yan QiaoNaiqi WuChunRong PanMengChu Zhou
Published in: ICNSC (2014)
Keyphrases
  • clustering algorithm
  • decision support
  • process model
  • real time
  • data sets
  • information retrieval
  • decision making
  • software tools
  • success or failure