A New Method to Determine the Tool Count of a Semiconductor Factory Using FabSim.
Holger VogtPublished in: WSC (2004)
Keyphrases
- detection method
- cost function
- high precision
- error rate
- pairwise
- significant improvement
- classification accuracy
- synthetic data
- experimental evaluation
- prior knowledge
- computational complexity
- computational cost
- decision trees
- support vector machine
- high accuracy
- input data
- theoretical analysis
- support vector machine svm
- multiresolution
- bayesian networks
- segmentation method
- classification method
- similarity measure