A Numerical Simulation of Motion of Particles under the Wafer in CMP.
Hao ZhangYuanqiang TanMingjun LiPublished in: CSSE (3) (2008)
Keyphrases
- numerical simulations
- theoretical analysis
- motion analysis
- motion estimation
- image sequences
- motion segmentation
- optical flow
- numerical calculation
- motion model
- lattice boltzmann
- simulation data
- semiconductor manufacturing
- temperature field
- computational fluid dynamics
- moving objects
- finite element method
- mobile robot