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Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms.

Franck RobinAndrea OrzatiEsteban Moreno SorianoOtte Jakob HomanWerner Bächtold
Published in: IEEE Trans. Evol. Comput. (2003)
Keyphrases
  • evolutionary optimization
  • learning algorithm
  • multi objective
  • genetic algorithm
  • pattern recognition
  • computational complexity
  • evolutionary algorithm
  • optimization problems
  • theoretical analysis