Position Sensing of Electrostatic MEMS Actuator.

Zdenek Kolka Viera Biolková Dalibor Biolek

Published in: ICECS 2022 (2022)

Keyphrases

sensor networks
real time
data sets
position control
spectrum sensing
position estimation
closed loop
data acquisition
control system
data mining
databases
hidden markov models
search algorithm
database systems
three dimensional
sensor fusion
position information
neural network