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Verification of the Effectiveness of UV-Polishing for 4H-SiC Wafer Using Photocatalyst and Cathilon.

Takeshi TanakaMasaru TakizawaAkihiro Hata
Published in: Int. J. Autom. Technol. (2018)
Keyphrases
  • databases
  • metadata
  • special case
  • model checking
  • machine learning
  • decision making
  • three dimensional
  • scheduling problem