Automated inspection of IC wafer contamination.

Reza Aghaeizadeh Zoroofi Hisashi Taketani Shinichi Tamura Yoshinobu Sato Kazuma Sekiya

Published in: Pattern Recognit. (2001)

Keyphrases

integrated circuit
artificial intelligence
objective function
semiconductor manufacturing
real time
information technology
cost function
case based reasoning
knowledge based systems
fine grained