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A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss.
Ph. Helin
A. Firrincieli
A. Ray Chaudhuri
N. Pham
S. Lenci
M. Mannarino
H. Osman
Published in:
OECC/PSC (2019)
Keyphrases
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high speed
control system
data acquisition
lower bound
upper bound
real time
case study
optimal control
cross section
control theory
neural network
bayesian networks
data sources
worst case
control method
adaptive control