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Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology.

Andrea López-TapiaMario Alfredo Reyes-BarrancaGriselda Stephany Abarca-JimenezLuis Sánchez-MárquezLuis Martín Flores-NavaOliverio Arellano-Cárdenas
Published in: CCE (2019)
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