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Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing.

Jeongsub ChoiMengmeng ZhuJihoon KangMyong K. Jeong
Published in: Ann. Oper. Res. (2024)
Keyphrases
  • multi sensor
  • semiconductor manufacturing
  • real time
  • high level
  • data fusion
  • mathematical model
  • recurrent neural networks