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Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing.
Jeongsub Choi
Mengmeng Zhu
Jihoon Kang
Myong K. Jeong
Published in:
Ann. Oper. Res. (2024)
Keyphrases
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multi sensor
semiconductor manufacturing
real time
high level
data fusion
mathematical model
recurrent neural networks