Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes.
Kei MasunishiEtsuji OgawaDaiki OnoFumito MiyazakiKengo UchidaJumpei OgawaHideaki MuraseFumitaka IshibashiYasushi TomizawaPublished in: SENSORS (2023)