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Robustness analysis of an MIP for production areas with time constraints and tool interruptions in semiconductor manufacturing.
Christian Maleck
Gerald Weigert
Detlef Pabst
Marcel Stehli
Published in:
WSC (2017)
Keyphrases
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semiconductor manufacturing
production system
analysis tool
databases
neural network
database systems
image analysis
quantitative analysis
data analysis
statistical analysis
multistage
software tools
production planning