Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer.

Xiaodan Miao Xuhan Dai Yi Huang Guifu Ding Xiao-Lin Zhao

Published in: Sensors (2016)

Keyphrases

machine learning
three dimensional
multi agent
genetic algorithm
decision making
image sequences
relational databases
artificial neural networks
control system
high frequency
integrated circuit
semiconductor manufacturing