Login / Signup

Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network.

Yilei FuZhisheng ZhangZhijie XiaHaiying WenMin DaiHui Zhang
Published in: M2VIP (2023)
Keyphrases
  • random forest
  • quality prediction
  • neural network
  • random forests
  • decision trees
  • recurrent neural networks
  • artificial neural networks
  • back propagation
  • genetic algorithm
  • ensemble methods
  • ensemble learning