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Nonlinear Generalized Predictive Control of the Crystal Diameter in CZ-Si Crystal Growth Process Based on Stacked Sparse Autoencoder.
Ding Liu
Ni Zhang
Lei Jiang
Xiao-Guo Zhao
Wei-Feng Duan
Published in:
IEEE Trans. Control. Syst. Technol. (2020)
Keyphrases
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predictive control
model predictive control
neural network
real time
mobile robot
neuro fuzzy
power plant