Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing.
Nirmal GovindDavid FronckowiakPublished in: WSC (2003)
Keyphrases
- discrete event simulation
- semiconductor manufacturing
- process control
- simulation tools
- physical processes
- simulation model
- software tools
- knowledge base
- simulation environment
- colored petri nets
- simulation software
- modeling method
- mathematical models
- decision support
- software development
- information extraction
- expert systems