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An algorithm to convert wafer to calendar-based preventive maintenance schedules for semiconductor manufacturing systems.
José A. Ramírez-Hernández
Emmanuel Fernández-Gaucherand
Published in:
CDC (2003)
Keyphrases
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manufacturing systems
computational complexity
objective function
optimal solution
cost function
database systems
search space
np hard
preventive maintenance
genetic algorithm
scheduling problem
simulated annealing
complex systems