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Modeling and Scheduling for the Clean Operation of Semiconductor Manufacturing.
Ya-Chih Tsai
Jihong Pang
Fuh-Der Chou
Published in:
ISICA (2019)
Keyphrases
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semiconductor manufacturing
discrete event simulation
scheduling problem
process control
resource allocation
production system
dynamic scheduling
container terminal
scheduling algorithm
databases
modeling language
modeling framework
modeling method
resource constraints
multiscale
database systems
social networks