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Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc0.095N-based S0 mode Lamb-wave resonators.

Jicong ZhaoZexin SunZhi DongYanmeng DangShitao LvWenhao YeHaiyan SunQuan Shi
Published in: Microelectron. J. (2024)
Keyphrases
  • experimental study
  • simulation study
  • data sets
  • artificial intelligence
  • empirical studies
  • statistical analysis
  • positive effects