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Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc0.095N-based S0 mode Lamb-wave resonators.
Jicong Zhao
Zexin Sun
Zhi Dong
Yanmeng Dang
Shitao Lv
Wenhao Ye
Haiyan Sun
Quan Shi
Published in:
Microelectron. J. (2024)
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