19.3 A MEMS-Based Dynamic Light Focusing System for Single-Cell Precision in optogenetics.
Cem YalcinNathan Tessema ErsumoGeorge BocchettiMohammad Meraj GhanbariNick AntipaSina Faraji AlamoutiLaura WallerDaniel LopezRikky MullerPublished in: ISSCC (2021)