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Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing.

ChengYu ZouGengHong WangLei GuJie LiNaiQi WuYan Qiao
Published in: IEEE Robotics Autom. Lett. (2024)
Keyphrases
  • semiconductor manufacturing
  • scheduling algorithm
  • process control
  • scheduling problem
  • real time
  • artificial intelligence
  • website
  • lower bound
  • production system
  • software tools