Login / Signup
Prognostics of tool failing behavior based on autoassociative Gaussian process regression for semiconductor manufacturing.
Li Zhu
Junghui Chen
Chun-I Chen
Published in:
ICIT (2020)
Keyphrases
</>
gaussian process regression
semiconductor manufacturing
auto associative
gaussian processes
discrete event simulation
neural network
gaussian process
covariance function
process control
artificial neural networks
associative memory
real time
reinforcement learning