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A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure.

Yulan LuSen ZhangYadong LiBo XieDeyong ChenJunbo WangJian Chen
Published in: NEMS (2019)
Keyphrases
  • small size
  • high sensitivity
  • learning algorithm
  • multiscale
  • real time
  • real world
  • information retrieval
  • hierarchical structure