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Partially Observable Markov Decision Process for Monitoring Multilayer Wafer Fabrication.
Marzieh Khakifirooz
Mahdi Fathi
Chen-Fu Chien
Published in:
IEEE Trans Autom. Sci. Eng. (2021)
Keyphrases
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wafer fabrication
partially observable markov decision process
decision theoretic
state and action spaces
state space
belief state
partially observable
reinforcement learning
evolutionary algorithm
scheduling problem
utility function