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Rigorous integration of semiconductor process and device simulators.

Thomas BinderAndreas HössingerSiegfried Selberherr
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2003)
Keyphrases
  • process model
  • three dimensional
  • data mining
  • machine learning
  • search engine
  • computer vision
  • multiscale
  • expert systems
  • information technology
  • mobile robot
  • knowledge discovery
  • process control
  • process management