A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Stacking Ensemble Learning.

Jiangchen Wu Yumeng Shi Yining Chen

Published in: CSAI (2023)

Keyphrases

ensemble learning
similarity measure
ensemble methods
prior knowledge
machine learning methods
data sets
support vector machine
unsupervised learning
support vector machine svm
optimization algorithm
prediction accuracy
base classifiers
generalization ability
ensemble classifier