Machine-Learning-Based Identification of Defect Patterns in Semiconductor Wafer Maps: An Overview and Proposal.
Fatima AdlyPaul D. YooSami MuhaidatYousof Al-HammadiPublished in: IPDPS Workshops (2014)
Keyphrases
- machine learning
- semiconductor manufacturing
- machine learning methods
- feature selection
- massively parallel
- explanation based learning
- computer vision
- machine learning approaches
- text classification
- data mining
- wafer fabrication
- model selection
- computational intelligence
- text mining
- data analysis
- transfer learning
- data sets
- information retrieval
- learning algorithm
- artificial intelligence
- decision trees
- pattern discovery
- design patterns
- pattern mining
- pattern recognition
- information extraction
- machine learning algorithms
- natural language
- knowledge acquisition
- knowledge representation
- support vector machine
- natural language processing
- software engineering