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Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber.

Zhenqiang LiuJinhui LeiYan ChenYang XiaJiaheng FengShuaiqiang MingWa Mao
Published in: J. Sensors (2022)
Keyphrases
  • control algorithm
  • temperature control
  • control system
  • control method
  • adaptive fuzzy
  • theoretical analysis
  • mathematical model
  • adaptive control