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A method for real-time control of thin film composition using OES and XPS.

Dong NiYiming LouPanagiotis D. ChristofidesLin ShaSandy LaoJane P. Chang
Published in: ACC (2003)
Keyphrases
  • real time control
  • thin film
  • databases
  • decision makers
  • shape from shading
  • neural nets