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Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process.
Jin-Chern Chiou
Lei-Chun Chou
You-Liang Lai
Sheng-Chieh Huang
Published in:
NEMS (2012)
Keyphrases
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high speed
low voltage
databases
real time
data sets
neural network
genetic algorithm
low cost
process model
steady state
low power
analog to digital converter