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A mask double patterning technique using litho simulation by wavelet transform.
Rance Rodrigues
Sandip Kundu
Published in:
ACM Great Lakes Symposium on VLSI (2010)
Keyphrases
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wavelet transform
image coding
image compression
subband
multiresolution
mathematical model
simulation model
multiscale
wavelet coefficients
high frequency
numerical simulations
wavelet analysis
machine learning
similarity measure
simulation study