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Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer.

Xiao YuQinhua JinTie LiYuelin Wang
Published in: NEMS (2012)
Keyphrases
  • integrated circuit
  • control method
  • process control
  • real time
  • control system
  • x ray
  • development process
  • dynamic model
  • thin film