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Novel method for detection of mixed-type defect patterns in wafer maps based on a single shot detector algorithm.
Tae San Kim
Jong Wook Lee
Won Kyung Lee
So Young Sohn
Published in:
J. Intell. Manuf. (2022)
Keyphrases
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detection algorithm
detection method
k means
synthetic and real images
computational complexity
three dimensional
viewpoint
pairwise
signal processing
color constancy