Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching

Teruhisa Akashi Yasuhiro Yoshimura

Published in: CoRR (2008)

Keyphrases

control system
user profiles
control strategy
search engine
case study
expert systems
integrated circuit
adaptive control
data sets
data mining
artificial intelligence
database systems
optimal control
control method
control problems