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Building semiconductor nanostructures atom by atom.

Marek KorkusinskiP. HawrylakM. ZielinskiW. ShengGerhard Klimeck
Published in: Microelectron. J. (2008)
Keyphrases
  • learning algorithm
  • search engine
  • computer vision
  • image sequences
  • boundary conditions
  • process control
  • semiconductor manufacturing