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Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties.
Guchuan Zhu
Julien Penet
Lahcen Saydy
Published in:
ACC (2006)
Keyphrases
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force control
parameter tuning
computationally efficient
optimal control
closed loop
robust stability
open loop
real time control
adaptive control
control method
database
fuzzy rules
particle filter
reinforcement learning
decision trees
computer vision
genetic algorithm
neural network